High Speed DRM - High Speed Development Rate Monitor
PCM 420 - Instrumentation for Plasma Diagnostics and Endpoint
PCM 3000 - Instrumentation for Plasma Diagnostics and Color Measurement
Model 110 Endpoint - Dual Channel Detector
Inspector 3000/3000P - Advanced Process Characterization for Lithography
Laser Reflectometer 220 -
Mounts and Probes

Inspector Capabilities and Applications

Using Inspector Reflectivity Measurements to Quantify Photochemical Conversion of Stepper/Mask and Substrate Sets and to Match Photochemical Performance of Process Cells

Pre-Exposure Reflectivity Optimization For Improved CD Control