We offer three standard Optical Probes for efficient gathering of light. For systems with bright, extended plasmas, we provide a probe with no lens. This gathers light from a cone with a 30 degree solid angle. For smaller open areas a probe with standard quartz optics (the Cylindrical Probe) is provided. For etchers with small anode to wafer distances, we have probes based on cylindrical lenses (the Elliptical Probe) to maximize collection efficiency.
Mounts
There are several mounting options available. We have an extensive inventory
of adaptor plates for specific other vendor systems. We also have a directional probe
mount which allows any of our standard probes to focus at the most sensitive
area in the plasma. A Universal Mount can clamp to any viewport
up to 6 inchs in diameter.