FEATURING IN-SITU REAL TIME OPTICAL MONITORS
Spectrally Resolved Emission, Transmission and Reflection

Applications

Plasma Diagnostics

Process Monitoring & Control

Thin Film & Optical Coating Thickness Measurement

Color Measurement

Develop & Etch End-point Detection

Process Development & Characterization

Features

Real Time Signal Processing using User-defined analysis routines

Chemical Identification using Patented Spectral Library

Key Data stored in SQL Database

1024 Element PDA
(optional intensifier)


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